Approach for Estimating Material Properties of Thin Film on Substrate by Inverse Analysis with Surface Wave Spectroscopy
Ihara, Ikuo, Tokura, Kiyofumi, Aizawa, Tatsuhiko, Koguchi, Hideo, Kihara, Junji
Published in Transactions of the Japan Society of Mechanical Engineers Series A (25.11.1994)
Published in Transactions of the Japan Society of Mechanical Engineers Series A (25.11.1994)
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