The Moscow Mathematical Society in the development of mathematics in Russia
Demidov, S. S., Tikhomirov, V. M., Tokareva, T. A.
Published in Russian mathematical surveys (01.02.2015)
Published in Russian mathematical surveys (01.02.2015)
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Journal Article
Hardmask composition having antireflective properties and method of patterning material using the same
TOKAREVA, NATALIYA, LEE, JIN KUK, UH, DONG SEON, HYUNG, KYUNG HEE, KIM, MIN SOO, CHEON, HWAN SUNG, NAM, IRINA, KIM, JONG SEOB, OH, CHANG IL, YOON, KYONG HO
Year of Publication 21.03.2013
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Year of Publication 21.03.2013
Patent
Hardmask composition having antireflective properties and method of patterning material using the same
UH, DONG-SEON, TOKAREVA, NATALIYA, LEE, JIN KUK, KIM, MIN-SOO, CHEON, HWAN SUNG, HYUNG, KYUNG-HEE, NAM, IRINA, YOON, KYONG-HO, KIM, JONG SEOB, OH, CHANG-IL
Year of Publication 16.02.2009
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Year of Publication 16.02.2009
Patent