(Invited) Stress Techniques in Advanced Transistor Architectures: Bulk FinFETs and Implant-Free Quantum Well Transistors
Eneman, Geert, Witters, Liesbeth, Collaert, Nadine, Mitard, Jerome, Hellings, Geert, Yamaguchi, Shinpei, De Keersgieter, An, Hikavyy, Andriy, Vincent, Benjamin, Favia, Paola, Bender, Hugo, Veloso, Anabela, Chiarella, Thomas, Togo, Mitsuhiro, Loo, Roger, De Meyer, Kristin, Mercha, Abdelkarim, Horiguchi, Naoto, Thean, Aaron
Published in ECS transactions (27.04.2012)
Published in ECS transactions (27.04.2012)
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Journal Article
Effects of Selecting Channel Direction in Improving Performance of Sub-100 nm MOSFETs Fabricated on (110) Surface Si Substrate
Nakamura, Hidetatsu, Ezaki, Tatsuya, Iwamoto, Toshiyuki, Togo, Mitsuhiro, Ikezawa, Takeo, Ikarashi, Nobuyuki, Hane, Masami, Yamamoto, Toyoji
Published in Japanese Journal of Applied Physics (2004)
Published in Japanese Journal of Applied Physics (2004)
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Journal Article
Wafer Level Variability Improvement by Spatial Source/Drain Activation and Ion Implantation Super Scan for FinFET Technology
Wang, Yanzhen, Yong, Yoong Hooi, Liu, Bingwu, Zhou, Dibao, Togo, Mitsuhiro, Choi, Dongil, Lee, Jae Gon, Lo, Hsien-Ching, Dou, Xinyuan, Gu, Sipeng, Shintri, Shashidhar, Tong, Weihua, Sargunas, Vidmantas, Argandona, Jorge
Published in IEEE transactions on semiconductor manufacturing (01.08.2018)
Published in IEEE transactions on semiconductor manufacturing (01.08.2018)
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Journal Article
Negative Bias Temperature Instability in p-FinFETs With 45 ^ Substrate Rotation
Moonju Cho, Ritzenthaler, Romain, Krom, Raymond, Higuchi, Yuichi, Kaczer, Ben, Chiarella, Thomas, Boccardi, Guillaume, Togo, Mitsuhiro, Horiguchi, Naoto, Kauerauf, Thomas, Groeseneken, Guido
Published in IEEE electron device letters (01.10.2013)
Published in IEEE electron device letters (01.10.2013)
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Journal Article
Process-Dependent N/PBTI Characteristics of TiN Gate FinFETs
Jin Ju Kim, Moonju Cho, Pantisano, L., Ukjin Jung, Young Gon Lee, Chiarella, T., Togo, M., Horiguchi, N., Groeseneken, G., Byoung Hun Lee
Published in IEEE electron device letters (01.07.2012)
Published in IEEE electron device letters (01.07.2012)
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Journal Article
Orientation Dependence of Si 1-x C x :P Growth and the Impact on FinFET Structures
Tolle, John, Weeks, K. Doran, Bauer, Matthias, Machkaoutsan, Vladimir, Maes, Jan Willem, Togo, Mitsuhiro, Brus, Stephan, Hikavyy, Andriy, Loo, Roger
Published in ECS transactions (15.03.2013)
Published in ECS transactions (15.03.2013)
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Journal Article
(Invited) Factors Impacting Threshold Voltage in Advanced CMOS Integration: Gate Last (FINFET) vs. Gate First (FDSOI)
Triyoso, Dina, Carter, Rick, Kluth, Jon, Luning, Scott, Child, Amy, Wahl, Jeremy, Mulfinger, Bob, Punchihewa, Kasun, Kumar, Anil, Kang, Laegu, Sporer, Ryan, Chen, Xiaobo, Straub, Sherry, Bohra, Girish, Patil, Suraj, Zhang, Xing, Chen, Alex, Togo, Mitsuhiro, Pal, Rohit
Published in ECS transactions (08.09.2015)
Published in ECS transactions (08.09.2015)
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