Theoretical and experimental study of high fluence germanium implantation into silicon. Contribution of atomic mixing
Gras-Marti, A, Jimenez-Rodriguez, JJ, Peon-Fernandez, J, Rodriguez-Vidal, M, Tognetti, NP, Carter, G, Nobes, MJ, Armour, DG
Published in Vacuum (01.01.1982)
Published in Vacuum (01.01.1982)
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