Mechanical and Dielectric Properties of Pure-Silica-Zeolite Low-k Materials
Li, Zijian, Johnson, Mark C., Sun, Minwei, Ryan, E. Todd, Earl, David J., Maichen, Wolfgang, Martin, Jeremy I., Li, Shuang, Lew, Christopher M., Wang, Junlan, Deem, Michael W., Davis, Mark E., Yan, Yushan
Published in Angewandte Chemie (International ed.) (25.09.2006)
Published in Angewandte Chemie (International ed.) (25.09.2006)
Get full text
Journal Article
Effect of low-frequency radio frequency on plasma-enhanced chemical vapor deposited ultra low-κ dielectric films for very large-scale integrated interconnects
Todd Ryan, E., Gates, Stephen M., Cohen, Stephan A., Ostrovski, Yuri, Adams, Ed, Virwani, Kumar, Grill, Alfred
Published in Journal of applied physics (14.04.2014)
Published in Journal of applied physics (14.04.2014)
Get full text
Journal Article
Property modifications of nanoporous pSiCOH dielectrics to enhance resistance to plasma-induced damage
Ryan, E. Todd, Gates, Stephen M., Grill, Alfred, Molis, Steven, Flaitz, Philip, Arnold, John, Sankarapandian, Muthumanickam, Cohen, Stephan A., Ostrovski, Yuri, Dimitrakopoulos, Christos
Published in Journal of applied physics (01.11.2008)
Published in Journal of applied physics (01.11.2008)
Get full text
Journal Article
Stress determination through diffraction: establishing the link between Kröner and Voigt/Reuss limits
Murray, Conal E., Jordan-Sweet, Jean L., Bedell, Stephen W., Ryan, E. Todd
Published in Powder diffraction (01.06.2015)
Published in Powder diffraction (01.06.2015)
Get full text
Journal Article
Properties of nanoporous silica thin films determined by high-resolution x-ray reflectivity and small-angle neutron scattering
Wu, Wen-li, Wallace, William E., Lin, Eric K., Lynn, Gary W., Glinka, Charles J., Ryan, E. Todd, Ho, Huei-Min
Published in Journal of applied physics (01.02.2000)
Published in Journal of applied physics (01.02.2000)
Get full text
Journal Article
Evaluation of Pore Structure in Pure Silica Zeolite MFI Low-k Thin Films Using Positronium Annihilation Lifetime Spectroscopy
Li, Shuang, Sun, Jianing, Li, Zijian, Peng, Huagen, Gidley, David, Ryan, E. Todd, Yan
Published in The journal of physical chemistry. B (05.08.2004)
Published in The journal of physical chemistry. B (05.08.2004)
Get full text
Journal Article
Understanding stress gradients in microelectronic metallization
Murray, Conal E., Ryan, E. Todd, Besser, Paul R., Witt, Christian, Jordan-Sweet, Jean L., Toney, Michael F.
Published in Powder diffraction (01.06.2012)
Published in Powder diffraction (01.06.2012)
Get full text
Journal Article
Development of Voltammetry-Based Techniques for Characterization of Porous Low-k/Cu Interconnect Integration Reliability
Kim, Choong-Un, Chen, LiangShan, Michael, Nancy, Bang, Woong Ho, Park, Young-Joon, Ryan, Todd E., King, Sean
Published in ECS transactions (01.01.2011)
Published in ECS transactions (01.01.2011)
Get full text
Journal Article
Absorption and Fluorescence Studies of Acridine in Subcritical and Supercritical Water
Ryan, E. Todd, Xiang, Tao, Johnston, Keith P, Fox, Marye Anne
Published in The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory (06.03.1997)
Published in The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory (06.03.1997)
Get full text
Journal Article
Tailoring dielectric materials for robust BEOL reliability
Bonilla, G., Shaw, T. M., Liniger, E. G., Cohen, S., Gates, S. M., Grill, A., Shobha, H., Penny, C. J., Ryan, E. T.
Published in 2012 IEEE International Reliability Physics Symposium (IRPS) (01.04.2012)
Published in 2012 IEEE International Reliability Physics Symposium (IRPS) (01.04.2012)
Get full text
Conference Proceeding
Materials Issues and Characterization of Low-k Dielectric Materials
Ryan, E. Todd, McKerrow, Andrew J., Leu, Jihperng, Ho, Paul S.
Published in MRS bulletin (01.10.1997)
Published in MRS bulletin (01.10.1997)
Get full text
Journal Article
Low dielectric constant materials for advanced interconnects
Morgen, Michael, Zhao, Jie-Hua, Hu, Chuan, Cho, Taiheui, Ho, Paul S., Todd, E.
Published in JOM (1989) (01.09.1999)
Published in JOM (1989) (01.09.1999)
Get full text
Journal Article
Mechanical and Dielectric Properties of Pure-Silica-Zeolite Low-k Materials
Li, Zijian, Johnson, Mark C., Sun, Minwei, Ryan, E. Todd, Earl, David J., Maichen, Wolfgang, Martin, Jeremy I., Li, Shuang, Lew, Christopher M., Wang, Junlan, Deem, Michael W., Davis, Mark E., Yan, Yushan
Published in Angewandte Chemie (25.09.2006)
Published in Angewandte Chemie (25.09.2006)
Get full text
Journal Article
LOW DIELECTRIC CONSTANT MATERIALS FOR ULSI INTERCONNECTS
Morgen, Michael, Ryan, E. Todd, Zhao, Jie-Hua, Hu, Chuan, Cho, Taiheui, Ho, Paul S
Published in Annual review of materials science (01.08.2000)
Published in Annual review of materials science (01.08.2000)
Get full text
Journal Article
Weighted mechanical models for residual stress determination using x-ray diffraction
Murray, Conal E., Bedell, Stephen W., Ryan, E. Todd
Published in Journal of applied physics (21.07.2013)
Published in Journal of applied physics (21.07.2013)
Get full text
Journal Article
Silane Decomposition on Cu Interconnects Inhibited by Ammonia
Ryan, E. Todd, Molis, Steven, Grill, Alfred
Published in Journal of the Electrochemical Society (2010)
Published in Journal of the Electrochemical Society (2010)
Get full text
Journal Article