Micromachining of polymers using atmospheric pressure inductively coupled helium plasma localized by a scanning nanopipette probe microscope
Toda, Shun, Nakazawa, Kenta, Ogino, Akihisa, Shimomura, Masaru, Iwata, Futoshi
Published in Journal of micromechanics and microengineering (01.06.2021)
Published in Journal of micromechanics and microengineering (01.06.2021)
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