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Year of Publication 01.08.2016
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Injector For Spatially Separated Atomic Layer Deposition Chamber
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Year of Publication 28.07.2016
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Year of Publication 28.07.2016
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IMPROVED INJECTOR FOR SPATIALLY SEPARATED ATOMIC LAYER DEPOSITION CHAMBER
TOBIN, JEFF, GRIFFIN, KEVIN, YUDOVSKY, JOSEPH, NEWMAN, ERAN, LIU, PATRICIA M, MILLER, AARON, SATO, TATSUYA E
Year of Publication 28.07.2016
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Year of Publication 28.07.2016
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Improved injector for spatially separated atomic layer deposition chamber
GRIFFIN KEVIN, TOBIN JEFF, LIU PATRICIA M, YUDOVSKY JOSEPH, MILLER AARON, SATO TATSUYA E, NEWMAN ERAN
Year of Publication 26.09.2017
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Year of Publication 26.09.2017
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Improved injector for spatially separated atomic layer deposition chamber
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Year of Publication 01.10.2016
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Sequential deposition/anneal film densification method
Tarafdar, Raihan M, Papasouliotis, George D, Rulkens, Ron, Hausmann, Dennis M, Tobin, Jeff, Tipton, Adrianne K, Nie, Bunsen
Year of Publication 07.09.2010
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Year of Publication 07.09.2010
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Sequential deposition/anneal film densification method
TOBIN JEFF, TIPTON ADRIANNE K, RULKENS RON, NIE BUNSEN, TARAFDAR RAIHAN M, PAPASOULIOTIS GEORGE D, HAUSMANN DENNIS M
Year of Publication 07.09.2010
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Year of Publication 07.09.2010
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