Design of linear-motion microactuators using piezoelectric thin films
Robbins, W P, Polla, D L, Tamagawa, T, Glumac, D E, Tjhen, W
Published in Journal of micromechanics and microengineering (1991)
Published in Journal of micromechanics and microengineering (1991)
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Journal Article
Properties of piezoelectric thin films for micromechanical devices and systems
Tjhen, W., Tamagawa, T., Ye, C.-P., Hsueh, C.-C., Schiller, P., Polla, D.L.
Published in [1991] Proceedings. IEEE Micro Electro Mechanical Systems (1991)
Published in [1991] Proceedings. IEEE Micro Electro Mechanical Systems (1991)
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Conference Proceeding