Scatterometric Porosimetry for porous low-k patterns characterization
Hurand, R., Bouyssou, R., Darnon, M., Tiphine, C., Licitra, C., El-kodadi, M., Chevolleau, T., David, T., Posseme, N., Besacier, M., Schiavone, P., Bailly, F., Joubert, O., Verove, C.
Published in 2011 IEEE International Interconnect Technology Conference (01.05.2011)
Published in 2011 IEEE International Interconnect Technology Conference (01.05.2011)
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