CMP surface characteristics of twinned copper subgrains
Ni, Chaoying, Hall, Ian W, Thomas, Terence M, So, Joseph K, Quanci, John
Published in Journal of physics. D, Applied physics (07.09.2004)
Published in Journal of physics. D, Applied physics (07.09.2004)
Get full text
Journal Article
CMP surface characteristics of twinned copper sub grains
CHAOYING NI, HALL, Ian W, THOMAS, Terence M, SO, Joseph K, QUANCI, John
Published in Journal of physics. D, Applied physics (2004)
Get full text
Published in Journal of physics. D, Applied physics (2004)
Journal Article