Ferroelectric FETs with Separated Capacitor in the Back-End-of-Line: Role of the Capacitance Ratio
Lehninger, David, Hoffmann, Raik, Sunbul, Ayse, Mahne, Hannes, Kampfe, Thomas, Bernert, Kerstin, Thiem, Steffen, Seidel, Konrad
Published in IEEE electron device letters (01.11.2022)
Published in IEEE electron device letters (01.11.2022)
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Journal Article
Integration of ferroelectric devices for advanced in-memory computing concepts
Seidel, Konrad, Lehninger, David, Sünbül, Ayse, Hoffmann, Raik, Revello, Ricardo, Yadav, Nandakishor, Vardar, Alptekin, Landwehr, Matthias, Heinig, Andreas, Mähne, Hannes, Bernert, Kerstin, Thiem, Steffen, Kämpfe, Thomas, Lederer, Maximilian
Published in Japanese Journal of Applied Physics (01.05.2024)
Published in Japanese Journal of Applied Physics (01.05.2024)
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Journal Article
A Study on Imprint Behavior of Ferroelectric Hafnium Oxide Caused by High‐Temperature Annealing
Sünbül, Ayse, Lehninger, David, Lederer, Maximilian, Mähne, Hannes, Hoffmann, Raik, Bernert, Kerstin, Thiem, Steffen, Schöne, Fred, Döllgast, Moritz, Haufe, Nora, Roy, Lisa, Kämpfe, Thomas, Seidel, Konrad, Eng, Lukas M.
Published in Physica status solidi. A, Applications and materials science (01.04.2023)
Published in Physica status solidi. A, Applications and materials science (01.04.2023)
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Journal Article
Memory Array Demonstration of fully integrated 1T-1C FeFET concept with separated ferroelectric MFM device in interconnect layer
Seidel, Konrad, Lehninger, David, Hoffmann, Raik, Ali, Tarek, Lederer, Maximilian, Revello, Ricardo, Mertens, Konstantin, Biedermann, Kati, Shen, Yukai, Wang, Defu, Landwehr, Matthias, Heinig, Andreas, Kampfe, Thomas, Mahne, Hannes, Bernert, Kerstin, Thiem, Steffen
Published in 2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) (12.06.2022)
Published in 2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) (12.06.2022)
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Conference Proceeding
Improved Endurance Reliability of Ferroelectric Hafnium Oxide-Based BEoL Integrated MFM Capacitors
Sunbul, Ayse, Lehninger, David, Hoffmann, Raik, Mahne, Hannes, Bernert, Kerstin, Thiem, Steffen, Kampfe, Thomas, Siedel, Konrad, Lederer, Maximilian, Eng, Lukas M.
Published in 2024 IEEE International Reliability Physics Symposium (IRPS) (14.04.2024)
Published in 2024 IEEE International Reliability Physics Symposium (IRPS) (14.04.2024)
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Conference Proceeding
Integration of BEoL Compatible 1T1C FeFET Memory Into an Established CMOS Technology
Lehninger, David, Mahne, Hannes, Ali, Tarek, Hoffmann, Raik, Olivo, Ricardo, Lederer, Maximilian, Mertens, Konstantin, Kampfe, Thomas, Biedermann, Kati, Landwehr, Matthias, Heinig, Andreas, Wang, Defu, Shen, Yukai, Bernert, Kerstin, Thiem, Steffen, Seidel, Konrad
Published in 2022 IEEE International Memory Workshop (IMW) (01.05.2022)
Published in 2022 IEEE International Memory Workshop (IMW) (01.05.2022)
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Conference Proceeding
A 110NM BCD-ON-SOI Technology Offering Best-In-Class Nonvolatile Memory IP for Automotive Application
Jiew, Chee Boon, Hudyryev, Andrey, Sommer, Marco, Gittel, Alexander, Mache, Joerg, Kirsten, Dagmar, Thiem, Steffen, Louis, Pascal, Domart, Francis, Devesa-Canicoba, Noelia
Published in 2024 Conference of Science and Technology for Integrated Circuits (CSTIC) (17.03.2024)
Published in 2024 Conference of Science and Technology for Integrated Circuits (CSTIC) (17.03.2024)
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Conference Proceeding
A Ferroelectric BEoL Module: Adding Non-Volatile Memories and Varactors to Existing Technology Nodes
Seidel, Konrad, Lehninger, David, Abdulazhanov, Sukhrob, Sunbul, Ayse, Hoffmann, Raik, Zimmermann, Katrin, Yadav, Nandakishor, Le, Quang Huy, Landwehr, Matthias, Heinig, Andreas, Mahne, Hannes, Bernert, Kerstin, Thiem, Steffen, Kampfe, Thomas, Lederer, Maximilian
Published in 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) (01.05.2023)
Published in 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) (01.05.2023)
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Conference Proceeding