New Developments in CrossBeam Technology
Hoffmeister, H, Schertel, A, Thesen, A, Ginauck, P
Published in Microscopy and microanalysis (01.08.2006)
Published in Microscopy and microanalysis (01.08.2006)
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Journal Article
Application of Aberration-Corrected TEM and Image Simulation to Nanoelectronics and Nanotechnology
Korgel, B.A., Lee, D.C., Hanrath, T., Yacaman, M.J., Thesen, A., Matijevic, M., Kilaas, R., Kisielowski, C., Diebold, A.C.
Published in IEEE transactions on semiconductor manufacturing (01.11.2006)
Published in IEEE transactions on semiconductor manufacturing (01.11.2006)
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Journal Article
Conference Proceeding
Performance estimation of a manufacturing cell using rotation scheduling
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Journal Article
Conference Proceeding