An N‐Heterocyclic Carbene Based Silver Precursor for Plasma‐Enhanced Spatial Atomic Layer Deposition of Silver Thin Films at Atmospheric Pressure
Boysen, Nils, Hasselmann, Tim, Karle, Sarah, Rogalla, Detlef, Theirich, Detlef, Winter, Manuela, Riedl, Thomas, Devi, Anjana
Published in Angewandte Chemie International Edition (03.12.2018)
Published in Angewandte Chemie International Edition (03.12.2018)
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Journal Article
Gas Diffusion Barriers Prepared by Spatial Atmospheric Pressure Plasma Enhanced ALD
Hoffmann, Lukas, Theirich, Detlef, Pack, Sven, Kocak, Firat, Schlamm, Daniel, Hasselmann, Tim, Fahl, Henry, Räupke, André, Gargouri, Hassan, Riedl, Thomas
Published in ACS applied materials & interfaces (01.02.2017)
Published in ACS applied materials & interfaces (01.02.2017)
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Journal Article
Atmospheric Pressure Plasma ALD of Titanium Oxide
Theirich, Detlef, Müller, Roman, Zilberberg, Kirill, Trost, Sara, Behrendt, Andreas, Riedl, Thomas
Published in Chemical vapor deposition (01.06.2013)
Published in Chemical vapor deposition (01.06.2013)
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Spatial Atmospheric Pressure Atomic Layer Deposition of Tin Oxide as an Impermeable Electron Extraction Layer for Perovskite Solar Cells with Enhanced Thermal Stability
Hoffmann, Lukas, Brinkmann, Kai O, Malerczyk, Jessica, Rogalla, Detlef, Becker, Tim, Theirich, Detlef, Shutsko, Ivan, Görrn, Patrick, Riedl, Thomas
Published in ACS applied materials & interfaces (14.02.2018)
Published in ACS applied materials & interfaces (14.02.2018)
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Journal Article
A carbene stabilized precursor for the spatial atomic layer deposition of copper thin films
Boysen, Nils, Misimi, Bujamin, Muriqi, Arbresha, Wree, Jan-Lucas, Hasselmann, Tim, Rogalla, Detlef, Haeger, Tobias, Theirich, Detlef, Nolan, Michael, Riedl, Thomas, Devi, Anjana
Published in Chemical communications (Cambridge, England) (18.11.2020)
Published in Chemical communications (Cambridge, England) (18.11.2020)
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Silver Thin‐Film Electrodes Grown by Low‐Temperature Plasma‐Enhanced Spatial Atomic Layer Deposition at Atmospheric Pressure
Hasselmann, Tim, Misimi, Bujamin, Boysen, Nils, Zanders, David, Wree, Jan‐Lucas, Rogalla, Detlef, Haeger, Tobias, Zimmermann, Florian, Brinkmann, Kai Oliver, Schädler, Sebastian, Theirich, Detlef, Heiderhoff, Ralf, Devi, Anjana, Riedl, Thomas
Published in Advanced materials technologies (10.01.2023)
Published in Advanced materials technologies (10.01.2023)
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Ein N‐heterocyclischer Carbenkomplex des Silbers für die plasmaunterstützte räumlich getrennte Atomlagenabscheidung dünner Silberschichten bei Atmosphärendruck
Boysen, Nils, Hasselmann, Tim, Karle, Sarah, Rogalla, Detlef, Theirich, Detlef, Winter, Manuela, Riedl, Thomas, Devi, Anjana
Published in Angewandte Chemie (03.12.2018)
Published in Angewandte Chemie (03.12.2018)
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Journal Article