Thermoelectric MEMS generators as a power supply for a body area network
Leonov, V., Fiorini, P., Sedky, S., Torfs, T., Van Hoof, C.
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
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Conference Proceeding
Micromachined endovascularly-implantable wireless aneurysm pressure sensors: from concept to clinic
Allen, M.G.
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
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Conference Proceeding
Effects of stress on the temperature coefficient of frequency in double clamped resonators
Melamud, R., Hopcroft, M., Jha, C., Bongsang Kim, Chandorkar, S., Candler, R., Kenny, T.W.
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
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Conference Proceeding
Integrated HF CMOS-MEMS square-frame resonators with on-chip electronics and electrothermal narrow gap mechanism
Chiung-Cheng Lo, Fang Chen, Fedder, G.K.
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
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Conference Proceeding
New surface micromachined angular rate sensor for vehicle stabilizing systems in automotive applications
Gomez, U.-M., Kuhlmann, B., Classen, J., Bauer, W., Lang, C., Veith, M., Esch, E., Frey, J., Grabmaier, F., Offterdinger, K., Raab, T., Faisst, H.-J., Willig, R., Neul, R.
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
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Conference Proceeding
Scavenging energy from human body: design of a piezoelectric transducer
Renaud, M., Sterken, T., Fiorini, P., Puers, R., Baert, K., van Hoof, C.
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
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Conference Proceeding
Encapsulation of vacuum sensors in a wafer level package using a gold-silicon eutectic
Mitchell, J., Lahiji, G.R., Najafi, K.
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
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Conference Proceeding
Frequency stability of wafer-scale encapsulated MEMS resonators
Bongsang Kim, Candler, R.N., Hopcroft, M., Agarwal, M., Woo-Tae Park, Kenny, T.W.
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
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Conference Proceeding
Hydrogen diffusion and pressure control of encapsulated MEMS resonators
Candler, R.N., Woo-Tae Park, Hopcroft, M., Bongsang Kim, Kenny, T.W.
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
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Conference Proceeding
The next generation integrated MEMS and CMOS process on SOI wafers for overdamped accelerometers
Chen, T.D., Kelly, T.W., Collins, D., Berthold, B., Brosnihan, T.J., Denison, T., Kuang, J., O'Kane, M., Weigold, J.W., Bain, D.
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
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Conference Proceeding
Inertial-grade out-of-plane and in-plane differential resonant silicon accelerometers (DRXLs)
Hyeon Cheol Kim, Seonho Seok, Ilwhan Kim, Soon-Don Choi, Kukjin Chun
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
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Conference Proceeding
Design and performance of a microelectromagnetic vibration powered generator
Beeby, S.P., Tudor, M.J., Koukharenko, E., White, N.M., O'Donnell, T., Saha, C., Kulkarni, S., Roy, S.
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
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Conference Proceeding
Determination of refractive index for single living cell using integrated biochip
Liang, X.J., Liu, A.Q., Zhang, X.M., Yap, P.H., Ayi, T.C., Yoon, H.S.
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
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Conference Proceeding
A bulk micromachined lateral axis gyroscope with vertical sensing comb capacitors
Zhenchuan Yang, Congshun Wang, Guizhen Yan, Yilong Hao, Guoying Wu
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
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Conference Proceeding
Transient liquid phase (TLP) bonding for microsystem packaging applications
Welch, W., Junseok Chae, Sang-Hyun Lee, Yazdi, N., Najafi, K.
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
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Conference Proceeding