High Quality Factors in Superlattice Ferroelectric Hf 0.5 Zr 0.5 O 2 Nanoelectromechanical Resonators
Zheng, Xu-Qian, Tharpe, Troy, Enamul Hoque Yousuf, S M, Rudawski, Nicholas G., Feng, Philip X.-L., Tabrizian, Roozbeh
Published in ACS applied materials & interfaces (17.08.2022)
Published in ACS applied materials & interfaces (17.08.2022)
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Journal Article
High Quality Factors in Superlattice Ferroelectric Hf0.5Zr0.5O2 Nanoelectromechanical Resonators
Zheng, Xu-Qian, Tharpe, Troy, Enamul Hoque Yousuf, S M, Rudawski, Nicholas G., Feng, Philip X.-L., Tabrizian, Roozbeh
Published in ACS applied materials & interfaces (17.08.2022)
Published in ACS applied materials & interfaces (17.08.2022)
Get full text
Journal Article
In-Plane Bulk Acoustic Resonators Using 50nm-Thick Nano-Laminated Ferroelectric Hf0.5Zr0.5O2
Tharpe, Troy, Hakim, Faysal, Tabrizian, Roozbeh
Published in 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) (20.06.2021)
Published in 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) (20.06.2021)
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Conference Proceeding
The Ferroelectric-Gate Fin Microwave Acoustic Signal Processor
Hakim, Faysal, Rudawski, Nicholas, Tharpe, Troy, Tabrizian, Roozbeh
Published in arXiv.org (02.02.2023)
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Published in arXiv.org (02.02.2023)
Paper