Integration Benefits of Carborane Molecular Implant for State-of-the-Art 28-nm Logic pFET Device Manufacturing
Li, C I, Shen, T M, Kuo, P, Liu, R, Chan, M, Yang, C L, Wu, J Y, Colombeau, B, Guo, B N, Thanigaivelan, T, Toh, T, Sun, H L, Wu, T, Lu, S
Published in IEEE electron device letters (01.04.2011)
Published in IEEE electron device letters (01.04.2011)
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Journal Article
Contact Resistance Reduction for Strained N-MOSFETs With Silicon-Carbon Source/Drain Utilizing Aluminum Ion Implant and Aluminum Profile Engineering
Qian Zhou, Shao-Ming Koh, Thanigaivelan, T., Henry, T., Yee-Chia Yeo
Published in IEEE transactions on electron devices (01.04.2013)
Published in IEEE transactions on electron devices (01.04.2013)
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Journal Article
Impact of a Germanium and Carbon Preamorphization Implant on the Electrical Characteristics of NiSi/Si Contacts With a Presilicide Sulfur Implant
Yi Tong, Qian Zhou, Chua, L. H., Thanigaivelan, T., Henry, T., Yee-Chia Yeo
Published in IEEE electron device letters (01.12.2011)
Published in IEEE electron device letters (01.12.2011)
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Journal Article
Fin Doping by Hot Implant for 14nm FinFET Technology and Beyond
Wood, Bingxi Sun, Khaja, Fareen Adeni, Colombeau, Benjamin P, Sun, Shiyu, Waite, Andrew, Jin, Miao, Chen, Hao, Chan, Osbert, Thanigaivelan, Thirumal, Pradhan, Nilay, Gossmann, Hans-Joachim L, Sharma, Shashank, Chavva, Venkataramana R, Cai, Man-Ping, Okazaki, Motoya, Munnangi, Samuel Swaroop, Ni, Chi-Nung, Suen, Wesley, Chang, Chorng-Ping, Mayur, Abhilash, Variam, Naushad, Brand, Adam D
Published in ECS transactions (31.08.2013)
Published in ECS transactions (31.08.2013)
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Journal Article
Impact of gallium implant for advanced CMOS halo/pocket optimization
Chin, Y. L., Yang, C. Y., Lee, T. H., Yeh, S. W., Chang, W. F., Huang, S. C., Yang, N. H., Chien, C. C., Lin, J. F., Li, G., Wu, J. Y., Guo, B. N., Colombeau, B., Thanigaivelan, T., Pradhan, N., Wu, T., Hou, M., Chen, S., Chung, C., Toh, T., Kouzminov, D., Barrett, D., Shim, K. H.
Published in 2014 20th International Conference on Ion Implantation Technology (IIT) (01.06.2014)
Published in 2014 20th International Conference on Ion Implantation Technology (IIT) (01.06.2014)
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Conference Proceeding
Ultra-shallow Carborane molecular implant for 22-nm node p-MOSFET performance boost
Colombeau, B., Thanigaivelan, T., Arevalo, E., Toh, T., Miura, R., Ito, H.
Published in 2009 International Workshop on Junction Technology (01.06.2009)
Published in 2009 International Workshop on Junction Technology (01.06.2009)
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Conference Proceeding
Novel technique to engineer aluminum profile at nickel-silicide/Silicon:Carbon interface for contact resistance reduction, and integration in strained N-MOSFETs with silicon-carbon stressors
Shao-Ming Koh, Qian Zhou, Thanigaivelan, T., Henry, T., Samudra, G. S., Yee-Chia Yeo
Published in 2011 International Electron Devices Meeting (01.12.2011)
Published in 2011 International Electron Devices Meeting (01.12.2011)
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Conference Proceeding
Precision ion implantation: A critical tool for advanced device processing
Gossmann, H.-J.L., Thanigaivelan, T., Hatem, C.
Published in 2008 9th International Conference on Solid-State and Integrated-Circuit Technology (01.10.2008)
Published in 2008 9th International Conference on Solid-State and Integrated-Circuit Technology (01.10.2008)
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Conference Proceeding
Method of processing substrate
COLOMBEAU, BENJAMIN, THANIGAIVELAN, THIRUMAL, SHIM, KYU-HA, RODIER, DENNIS, HATEM, CHRISTOPHER R
Year of Publication 11.04.2015
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Year of Publication 11.04.2015
Patent
Optimized halo or pocket cold implants
RODIER DENNIS, THANIGAIVELAN THIRUMAL, HATEM CHRISTOPHER R, SHIM KYU-HA, COLOMBEAU BENJAMIN
Year of Publication 20.06.2012
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Year of Publication 20.06.2012
Patent
Cold implant for optimized silicide formation
COLOMBEAU, BENJAMIN, SCHEUER, JAY T, THANIGAIVELAN, THIRUMAL, SHIM, KYU-HA, HATEM, CHRISTOPHER R
Year of Publication 01.10.2011
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Year of Publication 01.10.2011
Patent
Optimized halo or pocket cold implants
COLOMBEAU, BENJAMIN, THANIGAIVELAN, THIRUMAL, SHIM, KYU-HA, RODIER, DENNIS, HATEM, CHRISTOPHER R
Year of Publication 01.10.2011
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Year of Publication 01.10.2011
Patent
OPTIMIZED HALO OR POCKET COLD IMPLANTS
RODIER DENNIS, THANIGAIVELAN THIRUMAL, HATEM CHRISTOPHER R, SHIM, KYU HA, COLOMBEAU BENJAMIN
Year of Publication 31.05.2012
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Year of Publication 31.05.2012
Patent