Semiconductor Logic Technology Innovation to Achieve Sub-10 nm Manufacturing
Schuegraf, K., Abraham, M. C., Brand, A., Naik, M., Thakur, R.
Published in IEEE journal of the Electron Devices Society (01.03.2013)
Published in IEEE journal of the Electron Devices Society (01.03.2013)
Get full text
Journal Article
PROCESSING SYSTEMS AND METHODS FOR HALIDE SCAVENGING
LUBOMIRSKY DMITRY, VENKATARAMAN SHANKAR, HUANG JIAYIN, HAMANA HIROSHI, CHEN ZHIJUN, HSU CHING MEI, CHEN XINGLONG, WANG ANCHUAN, LI ZIHUI, INGLE NITIN K, THAKUR RANDHIR
Year of Publication 23.11.2015
Get full text
Year of Publication 23.11.2015
Patent
Integrated bit-line airgap formation and gate stack post clean
Purayath Vinod R, Ingle Nitin K, Thakur Randhir, Venkataraman Shankar
Year of Publication 26.09.2017
Get full text
Year of Publication 26.09.2017
Patent
INTEGRATED BIT-LINE AIRGAP FORMATION AND GATE STACK POST CLEAN
Purayath Vinod R, Ingle Nitin K, Thakur Randhir, Venkataraman Shankar
Year of Publication 09.02.2017
Get full text
Year of Publication 09.02.2017
Patent
Integrated bit-line airgap formation and gate stack post clean
Purayath Vinod R, Ingle Nitin K, Thakur Randhir, Venkataraman Shankar
Year of Publication 15.11.2016
Get full text
Year of Publication 15.11.2016
Patent
Integrated oxide recess and floating gate fin trimming
VENKATARAMAN SHANKAR, PURAYATH VINOD R, THAKUR RANDHIR, INGLE NITIN K
Year of Publication 28.06.2016
Get full text
Year of Publication 28.06.2016
Patent
WORDLINE 3D FLASH MEMORY AIR GAP
VENKATARAMAN SHANKAR, PURAYATH VINOD R, THAKUR RANDHIR, INGLE NITIN K
Year of Publication 11.02.2016
Get full text
Year of Publication 11.02.2016
Patent
INTEGRATED OXIDE RECESS AND FLOATING GATE FIN TRIMMING
VENKATARAMAN SHANKAR, PURAYATH VINOD R, THAKUR RANDHIR, INGLE NITIN K
Year of Publication 04.02.2016
Get full text
Year of Publication 04.02.2016
Patent