Improving optical thickness monitoring by including systematic and process-influenced transmittance deviations
Bruns, Stefan, Henning, Philipp, Melzig, Thomas, Terhürne, Jörg, Vergöhl, Michael
Published in Applied optics. Optical technology and biomedical optics (01.03.2023)
Published in Applied optics. Optical technology and biomedical optics (01.03.2023)
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Journal Article
Influence of fitting algorithms on thickness determination during monitoring of optical coatings
Melzig, Thomas, Amochkina, Tatiana, Bruns, Stefan, Farr, Philipp, Terhürne, Jörg, Trubetskov, Michael, Vergöhl, Michael
Published in Surface & coatings technology (30.01.2024)
Published in Surface & coatings technology (30.01.2024)
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Journal Article
Precise control and adjustment of uniformity for optical coatings on 2D and 3D components
Britze, Chris, Farr, Philipp, Vergöhl, Michael, Pflug, Andreas, Melzig, Thomas, Bruns, Stefan, Schäfer, Bernd, Mann, Klaus, Terhürne, Jörg
Published in Surface & coatings technology (30.03.2024)
Published in Surface & coatings technology (30.03.2024)
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Journal Article