Elastomer-based MEMS optical interferometric transducers for highly sensitive surface stress sensing for biomolecular detection
Takahashi, Kazuhiro, Fujie, Toshinori, Teramoto, Reina, Takahashi, Isao, Sato, Nobutaka, Takeoka, Shinji, Sawada, Kazuaki
Published in MRS communications (01.03.2019)
Published in MRS communications (01.03.2019)
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Journal Article