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Year of Publication 30.03.2023
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Effect of silicon wafer in situ cleaning on the chemical structure of ultrathin silicon oxide film
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SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
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Year of Publication 30.11.2023
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Year of Publication 23.03.2023
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Year of Publication 27.10.2020
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Silicon-hydrogen bonds in silicon oxide near the SiO2/Si interface
OGAWA, H, TERADA, N, SUGIYAMA, K, MORIKI, K, MIYATA, N, AOYAMA, T, SUGINO, R, ITO, T, HATTORI, T
Published in Applied surface science (1992)
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Year of Publication 12.03.2020
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Semiconductor device
Kitahara, Hiroyoshi, Nishigoori, Masahito, Terada, Naozumi, Fukai, Yasushi
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Year of Publication 03.12.2019
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SEMICONDUCTOR DEVICE
Kitahara, Hiroyoshi, Nishigoori, Masahito, Terada, Naozumi, Fukai, Yasushi
Year of Publication 21.03.2019
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Year of Publication 21.03.2019
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SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
YAMAMOTO TAKESHI, KITAHARA HIROYOSHI, TERADA NAOZUMI, NAKANE YU, TODA NOBUYUKI
Year of Publication 21.03.2023
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Year of Publication 21.03.2023
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