Quantitative thickness measurement of polarity-inverted piezoelectric thin-film layer by scanning nonlinear dielectric microscopy
Odagawa, Hiroyuki, Terada, Koshiro, Tanaka, Yohei, Nishikawa, Hiroaki, Yanagitani, Takahiko, Cho, Yasuo
Published in Japanese Journal of Applied Physics (01.10.2017)
Published in Japanese Journal of Applied Physics (01.10.2017)
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