Suppression of metal contamination by gettering
Teo, J.W.Y., Lim, H.W., Jin, Y., Huang, J.H., Chew, W.C., Leong, C.K., Gn, F.H., Li, M.F., Su, G.
Published in Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 (Cat. No.01TH8548) (2001)
Published in Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 (Cat. No.01TH8548) (2001)
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