Impact of coherence length on the field of view in dark-field holographic microscopy for semiconductor metrology: theoretical and experimental comparisons
Messinis, Christos, Tenner, Vasco T, De Boer, Johannes F, Witte, Stefan, den Boef, Arie
Published in Applied optics. Optical technology and biomedical optics (10.04.2020)
Published in Applied optics. Optical technology and biomedical optics (10.04.2020)
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Journal Article
Diffraction-based overlay metrology using angular-multiplexed acquisition of dark-field digital holograms
Messinis, Christos, van Schaijk, Theodorus T M, Pandey, Nitesh, Tenner, Vasco T, Witte, Stefan, de Boer, Johannes F, den Boef, Arie
Published in Optics express (07.12.2020)
Published in Optics express (07.12.2020)
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Journal Article
Uncertainty Estimation and Design Optimization of 2D Diffraction-Based Overlay Metrology Targets
Röhrich, Ruslan, Oliveri, Giorgio, Kovaios, Stefanos, Tenner, Vasco T, den Boef, Arie J, Overvelde, Johannes T. B, Koenderink, A. Femius
Published in ACS photonics (21.10.2020)
Published in ACS photonics (21.10.2020)
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Journal Article
Two-pulse lensless imaging with a broadband high-harmonic source
Witte, Stefan, Tenner, Vasco T., Noom, Daniel W. E., Eikema, Kjeld S. E.
Published in 2013 Conference on Lasers & Electro-Optics Europe & International Quantum Electronics Conference CLEO EUROPE/IQEC (01.05.2013)
Published in 2013 Conference on Lasers & Electro-Optics Europe & International Quantum Electronics Conference CLEO EUROPE/IQEC (01.05.2013)
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Conference Proceeding
Ultra-broadband extreme-ultraviolet lensless imaging of extended complex structures
Witte, Stefan, Tenner, Vasco T, Noom, Daniël W E, Eikema, Kjeld S E
Published in arXiv.org (25.02.2013)
Published in arXiv.org (25.02.2013)
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Paper
Journal Article
Dark field digital holographic microscope and related measurement method
TENNER VASCO TOMAS, DEN BOEF ARIE JEFFREY, CRAMER HUGO AUGUSTINUS JOSEPH, PANDEY NITESH
Year of Publication 22.08.2023
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Year of Publication 22.08.2023
Patent
MEASUREMENT METHOD AND MEASUREMENT DEVICE
VAN DE VEN BASTIAAN LAMBERTUS WILHELMUS MARINUS, TENNER VASCO TOMAS, CRAMER HUGO AUGUSTINUS JOSEPH, TUKKER TEUNIS WILLEM
Year of Publication 05.03.2024
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Year of Publication 05.03.2024
Patent
DARK FIELD DIGITAL HOLOGRAPHIC MICROSCOPE AND ASSOCIATED METROLOGY METHOD
CRAMER, HUGO AUGUSTINUS JOSEPH, TENNER, VASCO TOMAS, PANDEY, NITESH, DEN BOEF, ARIE JEFFREY
Year of Publication 11.02.2023
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Year of Publication 11.02.2023
Patent
METROLOGY METHOD AND METROLOGY DEVICE
VAN DE VEN, BASTIAAN LAMBERTUS WILHELMUS MARINUS, CRAMER, HUGO AUGUSTINUS JOSEPH, TENNER, VASCO TOMAS, TUKKER, TEUNIS WILLEM
Year of Publication 01.07.2023
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Year of Publication 01.07.2023
Patent
Dark field digital holographic microscope and associated metrology method
DIBOUR, JOHN, F, TENNER VASCO TOMAS, DEN BOEF ARIE JEFFREY, COENE WILLEM, PANDEY NITESH, MISCESI CLAUDIO
Year of Publication 29.07.2022
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Year of Publication 29.07.2022
Patent
Dark field digital holographic microscope and associated metrology method
CRAMER, HUGO AUGUSTINUS JOSEPH, TENNER, VASCO TOMAS, PANDEY, NITESH, DEN BOEF, ARIE JEFFREY
Year of Publication 01.07.2022
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Year of Publication 01.07.2022
Patent
Method of determining a characteristic of a structure, and metrology apparatus
MESSINIS, CHRISTOS, TENNER, VASCO TOMAS, DE BOER, JOHANNES FITZGERALD, DEN BOEF, ARIE JEFFREY
Year of Publication 11.06.2022
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Year of Publication 11.06.2022
Patent
Metrology method and metrology device
VAN DE VEN, BASTIAAN LAMBERTUS WILHELMUS MARINUS, CRAMER, HUGO AUGUSTINUS JOSEPH, TENNER, VASCO TOMAS, TUKKER, TEUNIS WILLEM
Year of Publication 01.03.2023
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Year of Publication 01.03.2023
Patent