Plasma-Assisted Atomic Layer Deposition of Palladium
Ten Eyck, G. A., Senkevich, J. J., Tang, F., Liu, D., Pimanpang, S., Karaback, T., Wang, G.-C., Lu, T.-M., Jezewski, C., Lanford, W. A.
Published in Chemical vapor deposition (01.01.2005)
Published in Chemical vapor deposition (01.01.2005)
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Journal Article
Plasma-Enhanced Atomic Layer Deposition of Palladium on a Polymer Substrate
Ten Eyck, G. A., Pimanpang, S., Juneja, J. S., Bakhru, H., Lu, T.-M., Wang, G.-C.
Published in Chemical vapor deposition (01.07.2007)
Published in Chemical vapor deposition (01.07.2007)
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Journal Article
Spectroscopy of multi-electrode tunnel barriers
Shirkhorshidian, A, John King Gamble, Maurer, L, Carr, S M, Dominguez, J, Ten Eyck, G A, Wendt, J R, Nielsen, E, Jacobson, N T, Lilly, M P, Carroll, M S
Published in arXiv.org (04.05.2017)
Published in arXiv.org (04.05.2017)
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Journal Article
Fabrication of quantum dots in undoped Si/Si\(_{0.8}\)Ge\(_{0.2}\) heterostructures using a single metal-gate layer
Lu, T M, Gamble, J K, Muller, R P, Nielsen, E, Bethke, D, Ten Eyck, G A, Pluym, T, Wendt, J R, Dominguez, J, Lilly, M P, Carroll, M S, Wanke, M C
Published in arXiv.org (29.08.2016)
Published in arXiv.org (29.08.2016)
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Journal Article
Double quantum dot with tunable coupling in an enhancement-mode silicon metal-oxide semiconductor device with lateral geometry
Tracy, L A, Nordberg, E P, Young, R W, C Borras Pinilla, Stalford, H L, Ten Eyck, G A, Eng, K, Childs, K D, Stevens, J, Lilly, M P, Eriksson, M A, Carroll, M S
Published in arXiv.org (29.10.2010)
Published in arXiv.org (29.10.2010)
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Journal Article
Hybridization of the negative index response by resonant coupling to a dipole absorber inside a metamaterial
Smolev, S, Zahyun Ku, Brueck, S, Brener, I, Sinclair, M B, Ten-Eyck, G A, Langston, W L, Basilio, L I
Published in CLEO/QELS: 2010 Laser Science to Photonic Applications (01.05.2010)
Published in CLEO/QELS: 2010 Laser Science to Photonic Applications (01.05.2010)
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Conference Proceeding
The Observation of Percolation-Induced 2D Metal-Insulator Transition in a Si MOSFET
Tracy, L A, Hwang, E H, Eng, K, Ten Eyck, G A, Nordberg, E P, Childs, K, Carroll, M S, Lilly, M P, S Das Sarma
Published in arXiv.org (18.05.2009)
Published in arXiv.org (18.05.2009)
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Journal Article
Charge sensing in enhancement mode double-top-gated metal-oxide-semiconductor quantum dots
Nordberg, E P, Stalford, H L, Young, R, Ten Eyck, G A, Eng, K, Tracy, L A, Childs, K D, Wendt, J R, Grubbs, R K, Stevens, J, Lilly, M P, Eriksson, M A, Carroll, M S
Published in arXiv.org (18.09.2009)
Published in arXiv.org (18.09.2009)
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Journal Article
Enhancement mode double top gated MOS nanostructures with tunable lateral geometry
Nordberg, E P, Ten Eyck, G A, Stalford, H L, Muller, R P, Young, R W, Eng, K, Tracy, L A, Childs, K D, Wendt, J R, Grubbs, R K, Stevens, J, Lilly, M P, Eriksson, M A, Carroll, M S
Published in arXiv.org (11.09.2009)
Published in arXiv.org (11.09.2009)
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Paper
Journal Article
Atomic Layer Deposition of Pd on an Oxidized Metal Substrate
Ten Eyck, G. A., Pimanpang, S., Bakhru, H., Lu, T.-M., Wang, G.-C.
Published in Chemical vapor deposition (01.05.2006)
Published in Chemical vapor deposition (01.05.2006)
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Journal Article
Evaluation of a Novel Cu(I) Precursor for Chemical Vapor Deposition
Ye, D.-X., Carrow, B., Pimanpang, S., Bakhru, H., Ten Eyck, G. A., Wang, G.-C., Lu, T.-M.
Published in Electrochemical and solid-state letters (2005)
Published in Electrochemical and solid-state letters (2005)
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Journal Article
Surface characterization of copper electroless deposition on atomic layer deposited palladium on iridium and tungsten
Kim, Young-Soon, Shin, Jiho, Cho, Joong-Hee, Ten Eyck, Gregory A., Liu, De-Li, Pimanpang, Samuk, Lu, Toh-Ming, Senkevich, Jay J., Shin, Hyung-Shik
Published in Surface & coatings technology (22.05.2006)
Published in Surface & coatings technology (22.05.2006)
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Journal Article
Electroless copper on refractory and noble metal substrates with an ultra-thin plasma-assisted atomic layer deposited palladium layer
Kim, Young-Soon, Kim, Hyung-Il, Cho, Joong-Hee, Seo, Hyung-Kee, Dar, M.A., Shin, Hyung-Shik, Ten Eyck, Gregory A., Lu, Toh-Ming, Senkevich, Jay J.
Published in Electrochimica acta (25.02.2006)
Published in Electrochimica acta (25.02.2006)
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Journal Article
Evaluation of a novel Gu(I) precursor for chemical vapor deposition
Ye, D-X, Carrow, B, Pimanpang, S, Bakhru, H, Eyck, G A Ten, Wang, G-C, Lu, T-M
Published in Electrochemical and solid-state letters (01.01.2005)
Published in Electrochemical and solid-state letters (01.01.2005)
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Journal Article