Micromachining of quartz plates: determination of a database by combined stereographic analysis and 3-D simulation of etching shapes
Tellier, C.R., Leblois, T.G.
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.09.2000)
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.09.2000)
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Journal Article
Conference Proceeding
Micromachining of GaAs structures with an acidic hydrogen peroxide solution
Tellier, C.R., Huve, G., Leblois, T.G.
Published in Sensors and actuators. A. Physical. (28.02.2006)
Published in Sensors and actuators. A. Physical. (28.02.2006)
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Journal Article
Chemical etching of Y-rotated quartz plates: experiments and theoretical approach
Leblois, T., Tellier, C.R., Messaoudi, T.
Published in Sensors and actuators. A. Physical. (01.06.1997)
Published in Sensors and actuators. A. Physical. (01.06.1997)
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Journal Article
ANISOTROPIC CHEMICAL ETCHING OF III-V CRYSTALS DISSOLUTION SLOWNESS SURFACE AND APPLICATION TO GaAs
TELLIER, C. R, HUVE, G, LEBLOIS, T. G
Published in Active and Passive Electronic Components (01.09.2004)
Published in Active and Passive Electronic Components (01.09.2004)
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Journal Article
Linear and non-linear effects of n-silicon: theory and simulation
Tellier, C.R., Charbonnieras, A.R., Durand, S.
Published in Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) (2003)
Published in Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) (2003)
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Conference Proceeding
A Database For The Etching of LGS in H2SO4: H2O
Tellier, C.R., Akil, M., Leblois, T.G.
Published in 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum (01.05.2007)
Published in 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum (01.05.2007)
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Conference Proceeding