EUV 소스에서 타겟 재료의 액적을 생성하기 위한 장치 및 방법
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Year of Publication 28.02.2024
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Year of Publication 28.02.2024
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견고한 유체 커플링 장치
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Year of Publication 23.03.2023
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Year of Publication 23.03.2023
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리소그래피 방사선 시스템에서의 극자외선 광원을 위한 하이브리드 액적 생성기
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Year of Publication 26.01.2023
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Year of Publication 26.01.2023
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ROBUST FLUID COUPLING APPARATUS
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Year of Publication 07.09.2023
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Year of Publication 07.09.2023
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HYBRID DROPLET GENERATOR FOR EXTREME ULTRAVIOLET LIGHT SOURCES IN LITHOGRAPHIC RADIATION SYSTEMS
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Year of Publication 01.06.2023
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Year of Publication 01.06.2023
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HYBRID DROPLET GENERATOR FOR EXTREME ULTRAVIOLET LIGHT SOURCES IN LITHOGRAPHIC RADIATION SYSTEMS
TELKAR, Vikas, Giridhar, TREES, Dietmar, Uwe, Herbert, BORGGREVE, Herman, Harry, DRIESSEN, Theodorus, Wilhelmus, JOHNSON, Brandon, Michael, SAMS, Benjamin, Andrew
Year of Publication 29.03.2023
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Year of Publication 29.03.2023
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Robust fluid coupling apparatus
TELKAR, VIKAS GIRIDHAR, SAMS, BENJAMIN ANDREW, DRIESSEN, THEODORUS WILHELMUS, TREES, DIETMAR UWE HERBERT, KINCAL, SERKAN, ERSHOV, ALEXANDER IGOREVICH
Year of Publication 01.03.2022
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Year of Publication 01.03.2022
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Hybrid droplet generator for extreme ultraviolet light sources in lithographic radiation systems
TELKAR, VIKAS GIRIDHAR, SAMS, BENJAMIN ANDREW, DRIESSEN, THEODORUS WILHELMUS, TREES, DIETMAR UWE HERBERT, BORGGREVE, HERMAN HARRY, JOHNSON, BRANDON MICHAEL
Year of Publication 01.03.2022
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Year of Publication 01.03.2022
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High pressure coupling assembly
TELKAR, VIKAS GIRIDHAR, SAMS, BENJAMIN ANDREW, DRIESSEN, THEODORUS WILHELMUS, TREES, DIETMAR UWE HERBERT, KAPADIA, RAHUL SUNIL, SWERDLOW, ETHAN MARCUS, RAJYAGURU, CHIRAG, VASCHENKO, GEORGIY OLEGOVICH, OLIVER, IAN ROGER, ERSHOV, ALEXANDER IGOREVICH
Year of Publication 01.12.2023
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Year of Publication 01.12.2023
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