Hollow Cathode Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using Pentachlorodisilane
Meng, Xin, Kim, Harrison Sejoon, Lucero, Antonio T, Hwang, Su Min, Lee, Joy S, Byun, Young-Chul, Kim, Jiyoung, Hwang, Byung Keun, Zhou, Xiaobing, Young, Jeanette, Telgenhoff, Michael
Published in ACS applied materials & interfaces (25.04.2018)
Published in ACS applied materials & interfaces (25.04.2018)
Get full text
Journal Article
Investigation of the Physical Properties of Plasma Enhanced Atomic Layer Deposited Silicon Nitride as Etch Stopper
Kim, Harrison Sejoon, Meng, Xin, Kim, Si Joon, Lucero, Antonio T, Cheng, Lanxia, Byun, Young-Chul, Lee, Joy S, Hwang, Su Min, Kondusamy, Aswin L. N, Wallace, Robert M, Goodman, Gary, Wan, Alan S, Telgenhoff, Michael, Hwang, Byung Keun, Kim, Jiyoung
Published in ACS applied materials & interfaces (26.12.2018)
Published in ACS applied materials & interfaces (26.12.2018)
Get full text
Journal Article
아미노-작용성 유기규소 화합물의 제조
DEVORE DAVID, FIGUEROA RUTH, TELGENHOFF MICHAEL, MOLITOR ERICH, FERRITTO MICHAEL, REKKEN BRIAN, FISK JASON, KUMBHALKAR MRUNMAYI, NEUMAN JOSEPH
Year of Publication 28.05.2024
Get full text
Year of Publication 28.05.2024
Patent
이민-작용성 유기규소 화합물 및 1차 아미노-작용성 유기규소 화합물의 제조
DEVORE DAVID, FIGUEROA RUTH, TULCHINSKY MICHAEL, TELGENHOFF MICHAEL, MOLITOR ERICH, FERRITTO MICHAEL, REKKEN BRIAN, NEUMAN JOSEPH, KUMBHALKAR MRUNMAYI
Year of Publication 27.05.2024
Get full text
Year of Publication 27.05.2024
Patent
프로필이민-작용성 유기규소 화합물 및 1차 아미노프로필-작용성 유기규소 화합물의 제조
BRAMMER MICHAEL, SPINNEY HEATHER, DEVORE DAVID, FIGUEROA RUTH, TULCHINSKY MICHAEL, TELGENHOFF MICHAEL, MOLITOR ERICH, FERRITTO MICHAEL, REKKEN BRIAN, BISWAS SOUVAGYA, NEUMAN JOSEPH, KUMBHALKAR MRUNMAYI
Year of Publication 28.05.2024
Get full text
Year of Publication 28.05.2024
Patent
아크릴옥시-작용성 유기실리콘 화합물의 제조 방법
VI THU, LIU NANGUO, TELGENHOFF MICHAEL, FISK JASON, SATHIOSATHAM MUHUNTHAN
Year of Publication 07.09.2021
Get full text
Year of Publication 07.09.2021
Patent
다작용성 유기실록산, 이를 함유하는 조성물, 및 이의 제조 방법
RICH DAVID, NIU ZHENBIN, LIU NANGUO, TELGENHOFF MICHAEL, LU GANG, WANG MICHAEL
Year of Publication 03.09.2021
Get full text
Year of Publication 03.09.2021
Patent
유기아미노실란의 제조 방법
MADDOCK JESSE A, TELGENHOFF MICHAEL D, REKKEN BRIAN D, FOSS ANTHONY E
Year of Publication 10.02.2021
Get full text
Year of Publication 10.02.2021
Patent
Hollow Cathode Plasma (HCP) Enhanced Atomic Layer Deposition of Silicon Nitride (SiNx) Thin Films Using Pentachlorodisilane (PCDS)
Hwang, Su Min, Kondusamy, Aswin L. N., Qin, Zhiyang, Kim, Harrison Sejoon, Meng, Xin, Kim, Jiyoung, Hwang, Byung Keun, Zhou, Xiaobing, Telgenhoff, Michael, Young, Jeanette
Published in ECS transactions (23.04.2019)
Published in ECS transactions (23.04.2019)
Get full text
Journal Article
오가노아미노실란의 제조 방법 및 오가노아미노실란으로부터 실릴아민을 제조하는 방법
MADDOCK JESSE A, TELGENHOFF MICHAEL D, ZHOU XIAOBING, REKKEN BRIAN D, KETOLA BARRY M
Year of Publication 27.08.2018
Get full text
Year of Publication 27.08.2018
Patent
고순도 트라이실릴아민, 제조 방법, 및 용도
MADDOCK JESSE A, TELGENHOFF MICHAEL D, ZHOU XIAOBING, REKKEN BRIAN D, KETOLA BARRY M
Year of Publication 27.08.2018
Get full text
Year of Publication 27.08.2018
Patent