The Etching Mechanisms of SiO2 in Hydrofluoric Acid
Verhaverbeke, S., Teerlinck, I., Vinckier, C., Stevens, G., Cartuyvels, R., Heyns, M. M.
Published in Journal of the Electrochemical Society (01.10.1994)
Published in Journal of the Electrochemical Society (01.10.1994)
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Journal Article
Vapor phase decomposition–droplet collection–total reflection X-ray fluorescence spectrometry for metallic contamination analysis on Ge wafers
Hellin, D., Geens, V., Teerlinck, I., Van Steenbergen, J., Rip, J., Laureyn, W., Raskin, G., Mertens, P.W., De Gendt, S., Vinckier, C.
Published in Spectrochimica acta. Part B: Atomic spectroscopy (28.02.2005)
Published in Spectrochimica acta. Part B: Atomic spectroscopy (28.02.2005)
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Journal Article
Cost-effective cleaning and high-quality thin gate oxides
Heyns, M. M., Bearda, T., Cornelissen, I., DeGendt, S., Degraeve, R., Groeseneken, G., Kenens, C., Knotter, D. M., Loewenstein, L. M., Mertens, P. W., Mertens, S., Meuris, M., Nigam, T., Schaekers, M., Teerlinck, I., Vandervorst, W., Vos, R., Wolke, K.
Published in IBM journal of research and development (01.05.1999)
Published in IBM journal of research and development (01.05.1999)
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Journal Article
Advanced cleaning for the growth of ultrathin gate oxide
Mertens, P.W., Bearda, T., Houssa, M., Loewenstein, L.M., Cornelissen, I., De Gendt, S., Kenis, K., Teerlinck, I., Vos, R., Meuris, M., Heyns, M.M.
Published in Microelectronic engineering (1999)
Published in Microelectronic engineering (1999)
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Conference Proceeding
Optimized HF solutions for ultra-clean Si surfaces
Teerlinck, I, Mertens, P W, Meuris, M, Heyns, M M
Published in Digest of technical papers - Symposium on VLSI Technology (01.01.1996)
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Published in Digest of technical papers - Symposium on VLSI Technology (01.01.1996)
Journal Article
Implementation of the IMEC-Clean in advanced CMOS manufacturing
Meuris, M., Arnauts, S., Cornelissen, I., Kenis, K., Lux, M., Degendt, S., Mertens, P., Teerlinck, I., Vos, R., Loewenstein, L., Heyns, M.M., Wolke, K.
Published in 1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat No.99CH36314) (1999)
Published in 1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat No.99CH36314) (1999)
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Conference Proceeding
The future of high- K on pure germanium and its importance for Ge CMOS
Meuris, M., Delabie, A., Van Elshocht, S., Kubicek, S., Verheyen, P., De Jaeger, B., Van Steenbergen, J., Winderickx, G., Van Moorhem, E., Puurunen, R.L., Brijs, B., Caymax, M., Conard, T., Richard, O., Vandervorst, W., Zhao, C., De Gendt, S., Schram, T., Chiarella, T., Onsia, B., Teerlinck, I., Houssa, M., Mertens, P.W., Raskin, G., Mijlemans, P., Biesemans, S., Heyns, M.M.
Published in Materials science in semiconductor processing (01.02.2005)
Published in Materials science in semiconductor processing (01.02.2005)
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Journal Article
Critical issues in post Cu CMP cleaning
Fyen, W., Vos, R., Teerlinck, I., Lagrange, S., Lauerhaas, J., Meuris, M., Mertens, P., Heyns, M.
Published in Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130) (2000)
Published in Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130) (2000)
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Conference Proceeding
Cost-effective cleaning and high-quality thin gate oxides: Ultrathin dielectric films
HEYNS, M. M, BEARDA, T, MERTENS, S, MEURIS, M, NIGAM, T, SCHAEKERS, M, TEERLINCK, I, VANDERVORST, W, VOS, R, WOLKE, K, CORNELISSEN, I, DE GENDT, S, DEGRAEVE, R, GROESENEKEN, G, KENENS, C, KNOTTER, D. M, LOEWENSTEIN, L. M, MERTENS, P. W
Published in IBM journal of research and development (1999)
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Published in IBM journal of research and development (1999)
Journal Article
Optimized HF solutions for ultra-clean Si surfaces
Teerlinck, I., Mertens, P.W., Meuris, M., Heyns, M.M.
Published in 1996 Symposium on VLSI Technology. Digest of Technical Papers (1996)
Published in 1996 Symposium on VLSI Technology. Digest of Technical Papers (1996)
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Conference Proceeding
Physical characterization of HfO/sub 2/ deposited on Ge substrates by MOCVD
Van Elshocht, S., Brijs, B., Caymax, M., Conard, T., De Gendt, S., Kubicek, S., Meuris, M., Onsia, B., Richard, O., Teerlinck, I., Van Steenbergen, J., Zhao, C., Heyns, M.
Published in International Semiconductor Device Research Symposium, 2003 (2003)
Published in International Semiconductor Device Research Symposium, 2003 (2003)
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Conference Proceeding
Ge deep sub-micron pFETs with etched TaN metal gate on a high-k dielectric, fabricated in a 200mm silicon prototyping line
De Jaeger, B., Houssa, M., Satta, A., Kubicek, S., Verheyen, P., Van Steenbergen, J., Croon, J., Kaczer, B., Van Elshocht, S., Delabie, A., Kunnen, E., Sleeckx, E., Teerlinck, I., Lindsay, R., Schram, T., Chiarella, T., Degraeve, R., Conard, T., Poortmans, J., Winderickx, G., Boullart, W., Schaekers, M., Mertens, P.W., Caymax, M., Vandervorst, W., Van Moorhem, E., Biesemans, S., De Meyer, K., Ragnarsson, L., Lee, S., Kota, G., Raskin, G., Mijlemans, P., Autran, J.-L., Afanas'ev, V., Stesmans, A., Meuris, M., Heyns, M.
Published in Proceedings of the 30th European Solid-State Circuits Conference (IEEE Cat. No.04EX850) (2004)
Published in Proceedings of the 30th European Solid-State Circuits Conference (IEEE Cat. No.04EX850) (2004)
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Conference Proceeding
Cost-effective cleaning for advanced Si-processing
Heyns, M.M., Bearda, T., Cornelissen, I., De Gendt, S., Knotter, D.M., Loewenstein, L.M., Lux, M., Mertens, P.W., Mertens, S., Meuris, M., Schaekers, M., Snee, P., Teerlinck, I., Vos, R.
Published in International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217) (1998)
Published in International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217) (1998)
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Conference Proceeding