Stress modeling of Cu/low-k BEoL - application to stress migration
Zhai, C.J., Yao, H.W., Besser, P.R., Marathe, A., Blish, R.C., Erb, D., Hau-Riege, C., Taylor, S., Taylor, K.O.
Published in 2004 IEEE International Reliability Physics Symposium. Proceedings (2004)
Published in 2004 IEEE International Reliability Physics Symposium. Proceedings (2004)
Get full text
Conference Proceeding