Three-dimensional micromachining of silicon using a nuclear microprobe
Teo, E.J, Tavernier, E.P, Breese, M.B.H, Bettiol, A.A, Watt, F, Liu, M.H, Blackwood, D.J
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.08.2004)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.08.2004)
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