65 nm Device Manufacture Using Shaped E-Beam Lithography
Pain, Laurent, Jurdit, Murielle, Laplanche, Yves, Todeschini, Jérôme, Leininger, Hugues, Tourniol, Sonia, Faure, Romuald, Bossy, Xavier, Palla, Ramiro, Beverina, Alessio, Broekaart, Marcel, Judong, Fabienne, Brosselin, Karine, Depoyan, Linda, Friec, Yannick Le, Leverd, Francois, Jonghe, Veronique De, Josse, Emmanuelle, Hinsinger, Olivier, Brun, Philippe, Henry, Daniel, Woo, Michael, Stolk, Peter, Tavel, Brice, Arnaud, Franck
Published in Japanese Journal of Applied Physics (01.06.2004)
Published in Japanese Journal of Applied Physics (01.06.2004)
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Journal Article
Smart Cut™ Piezo On Insulator (POI) substrates for high performances SAW components
Butaud, Eric, Tavel, Brice, Ballandras, Sylvain, Bousquet, Marie, Drouin, Alexis, Huyet, Isabelle, Courjon, Emilie, Ghorbel, Aymen, Reinhardt, Alexandre, Clairet, Alexandre, Bernard, Florent, Bertrand, Isabelle
Published in 2020 IEEE International Ultrasonics Symposium (IUS) (07.09.2020)
Published in 2020 IEEE International Ultrasonics Symposium (IUS) (07.09.2020)
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Conference Proceeding