Advanced Air Gap Process for Multi-Level-Cell Flash Memories Reducing Threshold Voltage Interference and Realizing High Reliability
Tsukamoto, Keisuke, Murata, Tatsunori, Fukumura, Tatsuya, Ohta, Fumihito, Yoshitake, Takayuki, Shimizu, Satoshi, Ikeda, Yoshihiro, Asai, Koyu, Shimizu, Masahiro, Tsuchiya, Osamu
Published in Japanese Journal of Applied Physics (01.04.2007)
Published in Japanese Journal of Applied Physics (01.04.2007)
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