Thermally Robust High‐Resistance Layers on Low‐Resistance Silicon Synthesized by Molecular CO+ Ion Implantation
Popov, Vladimir P., Tarkov, Sergey M., Tikhonenko, Fedor V., Antonov, Valentin A., Tyschenko, Ida E., Simakin, Sergey G., Rudenko, Konstantin V.
Published in Physica status solidi. A, Applications and materials science (01.12.2021)
Published in Physica status solidi. A, Applications and materials science (01.12.2021)
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