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Year of Publication 11.05.2017
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Plasma-induced photon irradiation damage on low-k dielectrics enhanced by Cu-line layout
Ikeda, Taro, Tanihara, Akira, Yamamoto, Nobuhiko, Kasai, Shigeru, Eriguchi, Koji, Ono, Kouichi
Published in 2015 International Conference on IC Design & Technology (ICICDT) (01.06.2015)
Published in 2015 International Conference on IC Design & Technology (ICICDT) (01.06.2015)
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Conference Proceeding
MICROWAVE RADIATION ANTENNA, MICROWAVE PLASMA SOURCE AND PLASMA PROCESSING APPARATUS
KOMATSU TOMOHITO, OSADA YUKI, FUJINO YUTAKA, MIYASHITA HIROYUKI, TANIHARA AKIRA, KASAI SHIGERU, IKEDA TARO
Year of Publication 18.06.2014
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Year of Publication 18.06.2014
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Method for forming insulating film and method for manufacturing semiconductor device
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Year of Publication 02.05.2017
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Year of Publication 02.05.2017
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Microwave radiation antenna, microwave plasma source and plasma processing apparatus
Komatsu Tomohito, Osada Yuki, Kasai Shigeru, Tanihara Akira, Ikeda Taro, Miyashita Hiroyuki, Fujino Yutaka
Year of Publication 17.01.2017
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Year of Publication 17.01.2017
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METHOD FOR FORMING INSULATING FILM AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
KUROTORI Takuya, KASAI Shigeru, KOTE Kenichi, MIYATANI Kotaro, FUJINO Yutaka, KAWAMURA Kohei, TANIHARA Akira
Year of Publication 18.08.2016
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Year of Publication 18.08.2016
Patent
MICROWAVE RADIATION ANTENNA, MICROWAVE PLASMA SOURCE AND PLASMA PROCESSING APPARATUS
KOMATSU TOMOHITO, OSADA YUKI, FUJINO YUTAKA, MIYASHITA HIROYUKI, TANIHARA AKIRA, KASAI SHIGERU, IKEDA TARO
Year of Publication 12.06.2014
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Year of Publication 12.06.2014
Patent