Effects of Si on Plasma Etching of Al–Cu–Si Alloy Films
Koubuchi, Yasushi, Sahara, Masashi, Torii, Yoshimi, Tanigaki, Yukio, Kato, Tokio, Inagaki, Masahisa
Published in Materials Transactions, JIM (1992)
Published in Materials Transactions, JIM (1992)
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Journal Article
Photochemical characterization of the surface oxide films of Al-Pd-Si and Al-Si
KOUBUCHI, Y, MORIBE, S, TANIGAKI, Y, KATO, T, INAGAKI, M, ONUKI, J
Published in Journal of the Electrochemical Society (01.07.1992)
Published in Journal of the Electrochemical Society (01.07.1992)
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Journal Article