Design of the nanopositioning and mechanical system for cavity-based X-ray free electron laser
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Published in Journal of physics. Conference series (01.12.2022)
Published in Journal of physics. Conference series (01.12.2022)
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CERAMIC SHOWERHEADS WITH CONDUCTIVE ELECTRODES
SINGH SARAVJEET, LUBOMIRSKY DMITRY, TAN TIEN FAK, LOH LOKKEE, PARK SOONAM, KALITA LAKSHESWAR, KIM TAE WON
Year of Publication 06.11.2023
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Year of Publication 06.11.2023
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CERAMIC SHOWERHEADS WITH CONDUCTIVE ELECTRODES
LAKSHESWAR KALITA, LOKKEE LOH, TAN TIEN FAK, SARAVJEET SINGH, PARK SOO-NAM, DMITRY LUBOMIRSKY, KIM TAE WON
Year of Publication 06.06.2023
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Year of Publication 06.06.2023
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SEMICONDUCTOR PROCESSING CHAMBER FOR IMPROVED PRECURSOR FLOW
LUBOMIRSKY DMITRY, TAN TIEN FAK, PHAM PHONG, SUAREZ EDWIN C, PARK SOONAM, JUNG SOONWOOK, LU RAYMOND W
Year of Publication 28.04.2023
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Year of Publication 28.04.2023
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전도성 전극들을 갖는 세라믹 샤워헤드들
SINGH SARAVJEET, LUBOMIRSKY DMITRY, TAN TIEN FAK, LOH LOKKEE, PARK SOONAM, KALITA LAKSHESWAR, KIM TAE WON
Year of Publication 24.08.2021
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Year of Publication 24.08.2021
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PROCESS WINDOW WIDENING USING COATED PARTS IN PLASMA ETCH PROCESSES
LUBOMIRSKY DMITRY, TAN TIEN FAK, YANG DONGQING, HILLMAN PETER, XIA MING, ZHU LALA, INGLE NITIN K, SNEDIGAR CHRISTOPHER
Year of Publication 13.06.2022
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Year of Publication 13.06.2022
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SYSTEMS AND METHODS FOR IMPROVED SEMICONDUCTOR ETCHING AND COMPONENT PROTECTION
LUBOMIRSKY DMITRY, TAN TIEN FAK, LOH LOK KEE, PARK SOONAM, JUNG SOONWOOK, CHOY MARTIN YUE
Year of Publication 03.02.2021
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Year of Publication 03.02.2021
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SYSTEMS AND METHODS FOR IMPROVED SEMICONDUCTOR ETCHING AND COMPONENT PROTECTION
MARTIN YUE CHOI, TAN TIEN FAK, LOH LOK KEE, JUNG SOONWOOK, DMITRY LUBOMIRSKY, PARK SOO-NAM
Year of Publication 24.12.2020
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Year of Publication 24.12.2020
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플라즈마 식각 프로세스들에서, 코팅된 부분들을 사용한 프로세스 윈도우 확장
LUBOMIRSKY DMITRY, TAN TIEN FAK, YANG DONGQING, HILLMAN PETER, XIA MING, ZHU LALA, INGLE NITIN K, SNEDIGAR CHRISTOPHER
Year of Publication 13.03.2020
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Year of Publication 13.03.2020
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개선된 반도체 식각 및 구성요소 보호를 위한 시스템들 및 방법들
LUBOMIRSKY DMITRY, TAN TIEN FAK, LOH LOK KEE, PARK SOONAM, JUNG SOONWOOK, CHOY MARTIN YUE
Year of Publication 02.01.2019
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Year of Publication 02.01.2019
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개선된 반도체 식각 및 구성요소 보호를 위한 시스템들 및 방법들
LUBOMIRSKY DMITRY, TAN TIEN FAK, LOH LOK KEE, PARK SOONAM, JUNG SOONWOOK, CHOY MARTIN YUE
Year of Publication 02.01.2019
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Year of Publication 02.01.2019
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SEMICONDUCTOR PROCESSING CHAMBER IMPROVING FLOW OF PRECURSOR
TAN TIEN FAK, EDWIN C SUAREZ, RAYMOND W LU, PHONG PHAM, JUNG SOONWOOK, DMITRY LUBOMIRSKY, PARK SOO-NAM
Year of Publication 10.01.2019
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Year of Publication 10.01.2019
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SEMICONDUCTOR PROCESSING CHAMBER FOR IMPROVED PRECURSOR FLOW
LUBOMIRSKY DMITRY, TAN TIEN FAK, PHAM PHONG, SUAREZ EDWIN C, PARK SOONAM, JUNG SOONWOOK, LU RAYMOND W
Year of Publication 27.11.2018
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Year of Publication 27.11.2018
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CHAMBER APPARATUS FOR CHEMICAL ETCHING OF DIELECTRIC MATERIALS
LUBOMIRSKY DMITRY, TAN TIEN FAK, FLOYD KIRBY H, NGUYEN SON T, PALAGASHVILI DAVID, TAM ALEXANDER, CHEN SHAOFENG
Year of Publication 06.01.2016
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Year of Publication 06.01.2016
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Instrument Boom Mechanisms on the THEMIS Satellites; Magnetometer, Radial Wire, and Axial Booms
Auslander, David, Cermenska, Joshua, Dalton, Gregory, de la Pena, Mauricio, Dharan, C. K. H., Donokowski, William, Duck, Robert, Kim, Jonghak, Pankow, David, Plauche, Alec, Rahmani, Mustapha, Sulack, Stephen, Tan, Tien Fak, Turin, Paul, Williams, Tyler
Published in Space science reviews (01.12.2008)
Published in Space science reviews (01.12.2008)
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Journal Article
Instrument Boom Mechanisms on the THEMIS Satellites; Magnetometer, Radial Wire, and Axial Booms: The THEMIS Mission
AUSLANDER, David, CERMENSKA, Joshua, RAHMANI, Mustapha, SULACK, Stephen, TIEN FAK TAN, TURIN, Paul, WILLIAMS, Tyler, DALTON, Gregory, DE LA PENA, Mauricio, DHARAN, C. K. H, DONOKOWSKI, William, DUCK, Robert, KIM, Jonghak, PANKOW, David, PLAUCHE, Alec
Published in Space science reviews (2008)
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Published in Space science reviews (2008)
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Ceramic showerheads with conductive electrodes
Lubomirsky, Dmitry, Tan, Tien Fak, Loh, LokKee, Singh, Saravjeet, Kim, Tae Won, Park, Soonam, Kalita, Laksheswar
Year of Publication 05.12.2023
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Year of Publication 05.12.2023
Patent
Systems and methods for improved semiconductor etching and component protection
Lubomirsky, Dmitry, Jung, Soonwook, Tan, Tien Fak, Choy, Martin Yue, Loh, Lok Kee, Park, Soonam
Year of Publication 22.08.2023
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Year of Publication 22.08.2023
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