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Year of Publication 08.12.2022
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INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTERNING
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Year of Publication 20.04.2023
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Year of Publication 20.04.2023
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Year of Publication 17.04.2023
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Year of Publication 02.09.2022
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Year of Publication 25.04.2022
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Year of Publication 25.04.2022
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WISE RICHARD, VOLOSSKIY BORIS, LI DA, LIANG ANDREW, LIANG CHEN WEI, PAN YANG, YUAN GE, YU JENGYI, TAN SAMANTHA S.H, YANG LIU
Year of Publication 09.12.2021
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Year of Publication 09.12.2021
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YANG WENBING, LILL THORSTEN, JANEK RICHARD P, SINGH HARMEET, TAN SAMANTHA S.H, SHEN MEIHUA, MARKS JEFFREY
Year of Publication 07.10.2015
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Year of Publication 07.10.2015
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METHOD TO ETCH NON-VOLATILE METAL MATERIALS
YANG WENBING, LILL THORSTEN, SINGH HARMEET, JANEK RICHARD P, SHEN MEIHUA, TAN SAMANTHA S.H, SHARMA PRITHU, MARKS JEFFREY
Year of Publication 07.10.2015
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Year of Publication 07.10.2015
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NON DESTRUCTIVE SELECTIVE DEPOSITION REMOVAL OF NON-METALLIC DEPOSITS FROM ALUMINUM CONTAINING SUBSTRATES
NISHIMURA YUKARI, BAO LIYUAN, JIANG ANBEI, LO SIO ON, SOMMERS JOSEPH F, TAN SAMANTHA S.H
Year of Publication 07.12.2011
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Year of Publication 07.12.2011
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(Invited) Divide Et Impera: Towards New Frontiers with Atomic Layer Etching
Lill, Thorsten, Kanarik, Keren J., Tan, Samantha S.H., Shen, Meihua, Pan, Yang, Marks, Jeffrey, Vahedi, Vahid, Gottscho, Richard A.
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Effective Defect Control in TiN Metal Hard Mask Cu/Low-k Dual Damascene Process
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Published in ECS transactions (31.08.2013)
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