A Realizable Overlay Virtual Metrology System in Semiconductor Manufacturing: Proposal, Challenges and Future Perspective
Tin, Tze Chiang, Tan, Saw Chin, Yong, Hing, Kim, Jimmy Ook Hyun, Teo, Eric Ken Yong, Lee, Ching Kwang, Than, Peter, Tan, Angela Pei San, Phang, Siew Chee
Published in IEEE access (2021)
Published in IEEE access (2021)
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Journal Article
The Implementation of a Smart Sampling Scheme C2O Utilizing Virtual Metrology in Semiconductor Manufacturing
Tin, Tze Chiang, Tan, Saw Chin, Yong, Hing, Kim, Jimmy Ook Hyun, Teo, Eric Ken Yong, Wong, Joanne Ching Yee, Lee, Ching Kwang, Than, Peter, Tan, Angela Pei San, Phang, Siew Chee
Published in IEEE access (2021)
Published in IEEE access (2021)
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Journal Article
Performance Assessment of Residential Building Management Utilizing Network Data Envelopment Analysis
Chen, Wei Tong, Tan, Pei-San, Fauzia, Nida, Wang, Chao Wei
Published in ISARC. Proceedings of the International Symposium on Automation and Robotics in Construction (01.01.2017)
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Published in ISARC. Proceedings of the International Symposium on Automation and Robotics in Construction (01.01.2017)
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