Wear-resistive and electrically conductive nitrogen-containing DLC film consisting of ultra-thin multilayers prepared by using filtered arc deposition
Harigai, Toru, Tamekuni, Koki, Iijima, Yushi, Degai, Satoshi, Tanimoto, Tsuyoshi, Suda, Yoshiyuki, Takikawa, Hirofumi, Takago, Shigeki, Yasui, Haruyuki, Kaneko, Satoru, Kunitsugu, Shinsuke, Habuchi, Hitoe, Kamiya, Masao, Taki, Makoto, Gonda, Hidenobu
Published in Japanese Journal of Applied Physics (01.06.2019)
Published in Japanese Journal of Applied Physics (01.06.2019)
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