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Published in Japanese Journal of Applied Physics (01.06.2009)
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Published in Japanese Journal of Applied Physics (01.06.2011)
Published in Japanese Journal of Applied Physics (01.06.2011)
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Journal Article
Microelectromechanical Systems Resonator Utilizing Torsional-to-Transverse Vibration Conversion
Kiso, Masaya, Okada, Mitsuhiro, Tamano, Akimasa, Fujiura, Hideaki, Miyauchi, Hideo, Niki, Kazuya, Tanigawa, Hiroshi, Suzuki, Kenichiro
Published in Japanese Journal of Applied Physics (01.06.2011)
Published in Japanese Journal of Applied Physics (01.06.2011)
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MICROMECHANICAL RESONATOR
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Year of Publication 17.04.2008
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Year of Publication 17.04.2008
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