New test structure for evaluating low-k dielectric interconnect layers by using ring-oscillators and metal comb/serpentine patterns
Tamaki, Y., Ito, M., Takimoto, Y., Hashino, M., Kawamoto, Y.
Published in 2011 IEEE ICMTS International Conference on Microelectronic Test Structures (01.04.2011)
Published in 2011 IEEE ICMTS International Conference on Microelectronic Test Structures (01.04.2011)
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Conference Proceeding
U-Groove Isolation Technology for High Density Bipolar LSI's
Tamaki, Yoichi, Kure, Tokuo, Shiba, Takeo, Higuchi, Hisayuki
Published in Japanese Journal of Applied Physics (01.01.1982)
Published in Japanese Journal of Applied Physics (01.01.1982)
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Journal Article
PHOTO SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND OPTICAL RECORDING REPRODUCING APPARATUS
TAMAKI YOICHI, KIMURA SHIGEHARU, SHIMANO TAKESHI, MAIO KENJI, DOI TAKESHI
Year of Publication 19.06.2002
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Year of Publication 19.06.2002
Patent
Impact of Silicon Surface Roughness on Device Performance and Novel Roughness Measurement Method
Nemoto, K., Watanabe, K., Hayashi, T., Tsugane, K., Tamaki, Y., Ota, H.
Published in 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.06.2007)
Published in 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.06.2007)
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Conference Proceeding
SEMICONDUCTOR DEVICE
OONISHI, KAZUHIRO, NAKANURA, DOUORU, WASHIO, KAZUYOSHI, ONAI, TAKAHIRO, SAITO, MASAYOSHI, TAMAKI, YOICHI, SHIBA, TAKEO
Year of Publication 01.06.2000
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Year of Publication 01.06.2000
Patent
New device structure using array transistors and flexible U-grooves suitable for 18-V, high-performance SOI complementary bipolar LSIs
Tamaki, Y., Tsuji, K., Otani, O., Nonami, H., Tomatsuri, T., Yoshida, E., Hamamoto, M., Nakazato, N.
Published in IEEE transactions on semiconductor manufacturing (01.05.2005)
Published in IEEE transactions on semiconductor manufacturing (01.05.2005)
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Journal Article
Conference Proceeding
Hetero-emitter-like characteristics of phosphorus doped polysilicon emitter transistors. Part I: band structure in the polysilicon emitter obtained from electrical measurements
Kondo, M., Kobayashi, T., Tamaki, Y.
Published in IEEE transactions on electron devices (01.03.1995)
Published in IEEE transactions on electron devices (01.03.1995)
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Journal Article
METHOD OF PRODUCING SEMICONDUCTOR DEVICES
OKAZAKI, SHINJI, TAKAKURA, TOSHIHIKO, TAMAKI, YOICHI, SAGARA, KAZUHIKO, NISHIZAWA, HIROTAKA, HASEGAWA, NORIO
Year of Publication 27.02.1986
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Year of Publication 27.02.1986
Patent
In situ phosphorus-doped polysilicon emitter technology for very high-speed, small emitter bipolar transistors
Shiba, T., Uchino, T., Ohnishi, K., Tamaki, Y.
Published in IEEE transactions on electron devices (01.06.1996)
Published in IEEE transactions on electron devices (01.06.1996)
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Journal Article
A very small bipolar transistor technology with sidewall polycide base electrode for ECL-CMOS LSIs
Shiba, T., Tamaki, Y., Onai, T., Kiyota, Y., Kure, T., Nakamura, T.
Published in IEEE transactions on electron devices (01.09.1996)
Published in IEEE transactions on electron devices (01.09.1996)
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Journal Article