Fabrication of Ni–W Microgears Using LIGA Process
Tamada, Kohzo, Amano, Sho, Okamoto, Kana, Takeuchi, Masaya, Yamaguchi, Akinobu, Utsumi, Yuichi, Yamasaki, Tohru
Published in Sensors and materials (27.12.2021)
Published in Sensors and materials (27.12.2021)
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