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Arc evaporator, method for driving arc evaporator, and ion plating apparatus
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Arc evaporator, method for driving arc evaporator, and ion plating apparatus
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Year of Publication 09.07.2003
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Arc evaporator, method for driving arc evaporator, and ion plating apparatus
MIYA YUKIO, NOSE KOUICHI, HORI TAKANOBU, TAKIGAWA SHIROU, KOIZUMI YASUHIRO
Year of Publication 17.06.2003
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Year of Publication 17.06.2003
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