Low specific contact resistance between InAs/Ni–InAs evaluated by multi-sidewall TLM
Sumita, Kei, Takeyasu, Jun, Toprasertpong, Kasidit, Takenaka, Mitsuru, Takagi, Shinichi
Published in AIP advances (01.05.2023)
Published in AIP advances (01.05.2023)
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Journal Article
Accurate evaluation of specific contact resistivity between InAs/Ni–InAs alloy using a multi-sidewall transmission line method
Sumita, Kei, Kato, Kimihiko, Takeyasu, Jun, Toprasertpong, Kasidit, Takenaka, Mitsuru, Takagi, Shinichi
Published in Japanese Journal of Applied Physics (01.04.2020)
Published in Japanese Journal of Applied Physics (01.04.2020)
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Journal Article
Effects of thermal annealing on film quality of InAs-On-Insulator structures fabricated by Smart Cut method
Sumita, Kei, Takeyasu, Jun, Kato, Kimihiko, Takenaka, Mitsuru, Takagi, Shinichi
Published in 2019 Compound Semiconductor Week (CSW) (01.05.2019)
Published in 2019 Compound Semiconductor Week (CSW) (01.05.2019)
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Conference Proceeding
Fabrication of High Quality InAs-on-Lnsulator Structures by Smart Cut Process with Reuse of InAs Wafers
Sumita, Kei, Takeyasu, Jun, Kato, Kimihiko, Toprasertpong, Kasidit, Takenaka, Mitsuru, Takagi, Shinichi
Published in 2019 International 3D Systems Integration Conference (3DIC) (01.10.2019)
Published in 2019 International 3D Systems Integration Conference (3DIC) (01.10.2019)
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Conference Proceeding
Advanced MOS Device Technology for Low Power Logic LSI
Takagi, Shinichi, Kato, Kimihiko, Sumita, Kei, Jo, Kwangwon, Lim, Cheol-Min, Takaguchi, Ryotaro, Ahn, Dae-Hwan, Takeyasu, Jun, Toprasertpong, Kasidit, Takenaka, Mitsuru
Published in 2019 MIXDES - 26th International Conference "Mixed Design of Integrated Circuits and Systems" (01.06.2019)
Published in 2019 MIXDES - 26th International Conference "Mixed Design of Integrated Circuits and Systems" (01.06.2019)
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Conference Proceeding