Amorphous Silicon Films Prepared by rf-Bias Sputtering
Suzuki, Masakuni, Suzuki, Makoto, Kanada, Matahiko, Shimizu, Shin, Takayama, Yukiyoshi, Yamaura, Tadashi
Published in Japanese Journal of Applied Physics (01.01.1982)
Published in Japanese Journal of Applied Physics (01.01.1982)
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