Development of high-precision micro-coordinate measuring machine: Multi-probe measurement system for measuring yaw and straightness motion error of XY linear stage
Yang, Ping, Takamura, Tomohiko, Takahashi, Satoru, Takamasu, Kiyoshi, Sato, Osamu, Osawa, Sonko, Takatsuji, Toshiyuki
Published in Precision engineering (01.07.2011)
Published in Precision engineering (01.07.2011)
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Journal Article
Profile measurement of aspheric surfaces using scanning deflectometry and rotating autocollimator with wide measuring range
Ishikawa, Kyohei, Takamura, Tomohiko, Xiao, Muzheng, Takahashi, Satoru, Takamasu, Kiyoshi
Published in Measurement science & technology (01.06.2014)
Published in Measurement science & technology (01.06.2014)
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Journal Article
Multi-probe scanning system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy
Yang, Ping, Takamura, Tomohiko, Takahashi, Satoru, Takamasu, Kiyoshi, Sato, Osamu, Osawa, Sonko, Takatsuji, Toshiyuki
Published in Precision engineering (01.10.2011)
Published in Precision engineering (01.10.2011)
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Journal Article