Effect of Al pre-deposition layer on the epitaxial growth of silicon on Al 2 O 3 /Si (111) substrates
Ishida, Makoto, Jung, Young-Chul, Miura, Hiroyuki, Koji, Yoshiaki, Sawada, Kazuaki, Yoshimoto, Mamoru, Keisuke, Mizuno, Takahumi, Miyahara, Hideaki, Maruta
Published in Thin solid films (01.07.2000)
Published in Thin solid films (01.07.2000)
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Journal Article
Effect of Al pre-deposition layer on the epitaxial growth of silicon on Al sub(2)O sub(3)/Si (111) substrates
Ishida, Makoto, Jung, Young-Chul, Miura, Hiroyuki, Koji, Yoshiaki, Sawada, Kazuaki, Yoshimoto, Mamoru, Keisuke, Mizuno, Takahumi, Miyahara, Hideaki, Maruta
Published in Thin solid films (01.07.2000)
Get full text
Published in Thin solid films (01.07.2000)
Journal Article
Effect of Al pre-deposition layer on the epitaxial growth of silicon on Al2O3/Si (111) substrates
ISHIDA, M, JUNG, Y.-C, MIURA, H, KOJI, Y, SAWADA, K, YOSHIMOTO, M, KEISUKE, M, TAKAHUMI, M, HIDEAKI, M
Published in Thin solid films (03.07.2000)
Published in Thin solid films (03.07.2000)
Get full text
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