Bombardment and gas rarefaction effects on the properties of sputtered Ti thin films
TSAI, W, BRETT, M. J, DEW, S. K, LIU, D, SMY, T, TAIT, R. N
Published in Thin solid films (15.12.1994)
Published in Thin solid films (15.12.1994)
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Conference Proceeding
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A design and implementation methodology for micromachining
Tait, R.N., Landsberger, L.M., Currie, J.F., McKinnon, G.H., Parameswaran, M., Robinson, A.M., Gale, D.J.
Published in Conference proceedings - Canadian Conference on Electrical and Computer Engineering (1996)
Published in Conference proceedings - Canadian Conference on Electrical and Computer Engineering (1996)
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Conference Proceeding
Journal Article