Graded Spin-on Organic Bottom Antireflective Coating for High NA Immersion Lithography
Goldfarb, Dario L., Vyklicky, Libor, Burns, Sean D., Petrillo, Karen, Arnold, John, Lisi, Anthony, Pfeiffer, Dirk, Sanders, Daniel D., Allen, Robert D., Medeiros, David R., Owe-Yang, Dah Chung, Noda, Kazumi, Tachiban, Seiichiro, Shirai, Shozo
Published in Journal of Photopolymer Science and Technology (01.01.2008)
Published in Journal of Photopolymer Science and Technology (01.01.2008)
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