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Future trends for large-area pulsed laser deposition
by
Greer, J.A.
,
Tabat
,
M.D
.
,
Lu, C.
Published in
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms
(1997)
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UV laser etching processes for film layers used in silicon integrated circuits
by
Loper, G.L.
,
Suck-Salk, S.H.
,
Tabat
,
M.D
.
Published in
Applied surface science
(1989)
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